技术特点 Features  

· PR stripper，Nit Stripper,，Pre-Clean，B-Clean，Metal etching，Recycle，Post CMP clean, EKC stripper，Post Ash Polymer Removal .

· PA adder, 0.16um <10ea u% <3% 氧化物刻蚀 SECS GEM, RMS, iEMS, FDC Scheduler.