技术特点 Features  

· PR stripper，Nit Stripper，Pre Clean，Metal Etch,，EKC stripper，Post Ash Polymer Removal， Wafer Recycle, Carrier Clean.

· PA adder, >0.16um <30ea u% <3% 氧化物刻蚀 SECS GEM, RMS, iEMS, FDC Scheduler.